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From aggressive scaling of ULSI devices to nanomaterials

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-17T21:19:21Z
dc.date.available2021-10-17T21:19:21Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14935
dc.sourceIIOimport
dc.titleFrom aggressive scaling of ULSI devices to nanomaterials
dc.typeMeeting abstract
dc.source.peerreviewno
dc.source.beginpage13
dc.source.conferenceRusnanotech: Nanotechnology International Forum
dc.source.conferencedate6/10/2009
dc.source.conferencelocationMoscow Russia
imec.availabilityPublished - imec


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