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Challenges of UV curing of low-k materials: Effect of wavelength

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorMarsik, Prema
dc.date.accessioned2021-10-17T21:19:24Z
dc.date.available2021-10-17T21:19:24Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14936
dc.sourceIIOimport
dc.titleChallenges of UV curing of low-k materials: Effect of wavelength
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.conference9th International Seminar "Porous Glasses - Special Glasses"
dc.source.conferencedate1/09/2009
dc.source.conferencelocationWroclaw Poland
imec.availabilityPublished - imec


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