Publication:
Investigation of thermo-elastic damping of vibrations of rectangular and ring-shaped MEMS resonators
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1892 since deposited on 2021-10-17
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Acq. date: 2026-08-10
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Statistics
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1892 since deposited on 2021-10-17
2last month
2last week
Acq. date: 2026-08-10
Citations