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Investigation of thermo-elastic damping of vibrations of rectangular and ring-shaped MEMS resonators
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Authors
Barauskas, R.
;
Kausinis, S.
;
Tilmans, Harrie
ISSN
1392-8716
Issue
1
Journal
Journal of Vibroengineering
Volume
11
Title
Investigation of thermo-elastic damping of vibrations of rectangular and ring-shaped MEMS resonators
Publication type
Journal article
Embargo date
9999-12-31
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