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Investigation of thermo-elastic damping of vibrations of rectangular and ring-shaped MEMS resonators

dc.contributor.authorBarauskas, R.
dc.contributor.authorKausinis, S.
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-17T21:19:34Z
dc.date.available2021-10-17T21:19:34Z
dc.date.issued2009
dc.identifier.issn1392-8716
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14939
dc.sourceIIOimport
dc.titleInvestigation of thermo-elastic damping of vibrations of rectangular and ring-shaped MEMS resonators
dc.typeJournal article
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage177
dc.source.endpage187
dc.source.journalJournal of Vibroengineering
dc.source.issue1
dc.source.volume11
imec.availabilityPublished - open access


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