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Efficient extraction of thin film thermal properties via parametric model order reduction and optimization

dc.contributor.authorBechtold, T.
dc.contributor.authorHohlfeld, Dennis
dc.contributor.authorRudnyi, E.B.
dc.date.accessioned2021-10-17T21:20:54Z
dc.date.available2021-10-17T21:20:54Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14959
dc.sourceIIOimport
dc.titleEfficient extraction of thin film thermal properties via parametric model order reduction and optimization
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage2437
dc.source.endpage2440
dc.source.conferenceInternational Solid-State Sensors, Actuators and Microsystems Conference - TRANSDUCERS
dc.source.conferencedate21/06/2009
dc.source.conferencelocationDenver, CO USA
imec.availabilityPublished - imec


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