Efficient extraction of thin film thermal properties via parametric model order reduction and optimization
dc.contributor.author | Bechtold, T. | |
dc.contributor.author | Hohlfeld, Dennis | |
dc.contributor.author | Rudnyi, E.B. | |
dc.date.accessioned | 2021-10-17T21:20:54Z | |
dc.date.available | 2021-10-17T21:20:54Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14959 | |
dc.source | IIOimport | |
dc.title | Efficient extraction of thin film thermal properties via parametric model order reduction and optimization | |
dc.type | Proceedings paper | |
dc.source.peerreview | no | |
dc.source.beginpage | 2437 | |
dc.source.endpage | 2440 | |
dc.source.conference | International Solid-State Sensors, Actuators and Microsystems Conference - TRANSDUCERS | |
dc.source.conferencedate | 21/06/2009 | |
dc.source.conferencelocation | Denver, CO USA | |
imec.availability | Published - imec |
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