Show simple item record

Novel micromirror design with variable pull-in voltage

dc.contributor.authorBeernaert, R.
dc.contributor.authorPodprocky, Tomas
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorAvci, Aykut
dc.contributor.authorDe Smet, Jelle
dc.contributor.authorDe Smet, Herbert
dc.date.accessioned2021-10-17T21:21:14Z
dc.date.available2021-10-17T21:21:14Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14964
dc.sourceIIOimport
dc.titleNovel micromirror design with variable pull-in voltage
dc.typeOral presentation
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Smet, Herbert
dc.source.peerreviewno
dc.source.conference35th International Conference on Micro & Nano Engineering (MNE)
dc.source.conferencedate28/09/2009
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record