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Micromirror with electromechanical pulse width modulation

dc.contributor.authorBeernaert, Roel
dc.contributor.authorPodprocky, Tomas
dc.contributor.authorAvci, Aykut
dc.contributor.authorDe Smet, Jelle
dc.contributor.authorDe Smet, Herbert
dc.date.accessioned2021-10-17T21:21:18Z
dc.date.available2021-10-17T21:21:18Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14965
dc.sourceIIOimport
dc.titleMicromirror with electromechanical pulse width modulation
dc.typeProceedings paper
dc.contributor.imecauthorDe Smet, Herbert
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage428
dc.source.endpage431
dc.source.conferenceProceedings of the 29th International Display Research Conference (Eurodisplay 2009)
dc.source.conferencedate14/09/2009
dc.source.conferencelocationRome Italy
imec.availabilityPublished - open access


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