Show simple item record

Freeform illumination sources: Source mask optimization for 22 nm node SRAM

dc.contributor.authorBekaert, Joost
dc.contributor.authorLaenens, Bart
dc.contributor.authorVerhaegen, Staf
dc.contributor.authorVan Look, Lieve
dc.contributor.authorTrivkovic, Darko
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorVan Adrichem, Paul
dc.contributor.authorSocha, Robert
dc.contributor.authorMulder, M.
dc.contributor.authorBaron, Stanislas
dc.contributor.authorTsai, Min-Chun
dc.contributor.authorNing, Kai
dc.contributor.authorHsu, Stephen
dc.contributor.authorBouma, A.
dc.contributor.authorvan der Heijden, E.
dc.contributor.authorSchreel, Koen
dc.contributor.authorCarpaij, R.
dc.contributor.authorDusa, Mircea
dc.contributor.authorZimmerman, Joerg
dc.contributor.authorGraeupner, Paul
dc.contributor.authorHennerkes, Christoph
dc.date.accessioned2021-10-17T21:21:24Z
dc.date.available2021-10-17T21:21:24Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14966
dc.sourceIIOimport
dc.titleFreeform illumination sources: Source mask optimization for 22 nm node SRAM
dc.typeProceedings paper
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorTrivkovic, Darko
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorVan Adrichem, Paul
dc.contributor.imecauthorDusa, Mircea
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference6th International Symposium on Immersion Lithography Extensions
dc.source.conferencedate22/10/2009
dc.source.conferencelocationPrague Czech Republic
imec.availabilityPublished - open access
imec.internalnotese-proceedings Sematech-website


Files in this item

Thumbnail
Name:
18879.pdf
Size:
4.918Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record