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Direct measurement of cesium retention for sputtering with low energy Cs+ and oxygen background flooding

dc.contributor.authorBerghmans, Bart
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T21:22:17Z
dc.date.available2021-10-17T21:22:17Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14978
dc.sourceIIOimport
dc.titleDirect measurement of cesium retention for sputtering with low energy Cs+ and oxygen background flooding
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewyes
dc.source.conferenceSIMS XVII
dc.source.conferencedate13/09/2009
dc.source.conferencelocationToronto Canada
imec.availabilityPublished - imec


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