3D system integration and interconnect hierarchy: definitions and technology trends
dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2021-10-17T21:22:58Z | |
dc.date.available | 2021-10-17T21:22:58Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14987 | |
dc.source | IIOimport | |
dc.title | 3D system integration and interconnect hierarchy: definitions and technology trends | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | SEMI KGD Packaging & Test Workshop | |
dc.source.conferencedate | 1/10/2009 | |
dc.source.conferencelocation | Santa Clara, CA USA | |
imec.availability | Published - open access |