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3D IC integration tutorial. Definitions and classifications

dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-17T21:23:03Z
dc.date.available2021-10-17T21:23:03Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14988
dc.sourceIIOimport
dc.title3D IC integration tutorial. Definitions and classifications
dc.typeOral presentation
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceIEEE International Conference on 3D System Integration - 3D IC
dc.source.conferencedate27/09/2009
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access


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