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3D-System integration using through-Si via technologies

dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-17T21:23:07Z
dc.date.available2021-10-17T21:23:07Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14989
dc.sourceIIOimport
dc.title3D-System integration using through-Si via technologies
dc.typeOral presentation
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceIMAPS Benelux Spring Seminar "3D System integration"
dc.source.conferencedate25/06/2009
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - open access


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