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Optimization of Al2O3 based VARIOT engineered tunnel dielectric for floating gate flash scaling
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Authors
Blomme, Pieter
;
De Vos, Joeri
;
Van Houdt, Jan
Conference
International Memory Workshop - IMW
Title
Optimization of Al2O3 based VARIOT engineered tunnel dielectric for floating gate flash scaling
Publication type
Proceedings paper
Embargo date
9999-12-31
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