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Minimizing the size of force-controlled point contacts on silicon for carrier profiling

dc.contributor.authorSnauwaert, Johan
dc.contributor.authorBlanc, N.
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.date.accessioned2021-09-29T15:27:47Z
dc.date.available2021-09-29T15:27:47Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1502
dc.sourceIIOimport
dc.titleMinimizing the size of force-controlled point contacts on silicon for carrier profiling
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1513
dc.source.endpage1517
dc.source.journalJ. Vacuum Science and Technology B
dc.source.issue2
dc.source.volumeB14
imec.availabilityPublished - open access


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