Minimizing the size of force-controlled point contacts on silicon for carrier profiling

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Authors

Snauwaert, Johan; Blanc, N.; De Wolf, Peter; Vandervorst, Wilfried; Hellemans, L.

Issue

2

Journal

J. Vacuum Science and Technology B

Volume

B14

Title

Minimizing the size of force-controlled point contacts on silicon for carrier profiling

Publication type

Journal article

Embargo date

9999-12-31

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