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Analysis of the effect of point-of-use filtration on microbridging defectivity

dc.contributor.authorBraggin, Jennifer
dc.contributor.authorGronheid, Roel
dc.contributor.authorCheng, Shaunee
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorBernard, Sophie
dc.contributor.authorFoubert, Philippe
dc.contributor.authorRosslee, Craig
dc.date.accessioned2021-10-17T21:27:15Z
dc.date.available2021-10-17T21:27:15Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15033
dc.sourceIIOimport
dc.titleAnalysis of the effect of point-of-use filtration on microbridging defectivity
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorFoubert, Philippe
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage72730S
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXVI
dc.source.conferencedate22/02/2009
dc.source.conferencelocationSan José, CA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings SPIE; Vol. 7273


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