dc.contributor.author | Braggin, Jennifer | |
dc.contributor.author | Gronheid, Roel | |
dc.contributor.author | Cheng, Shaunee | |
dc.contributor.author | Van Den Heuvel, Dieter | |
dc.contributor.author | Bernard, Sophie | |
dc.contributor.author | Foubert, Philippe | |
dc.contributor.author | Rosslee, Craig | |
dc.date.accessioned | 2021-10-17T21:27:15Z | |
dc.date.available | 2021-10-17T21:27:15Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15033 | |
dc.source | IIOimport | |
dc.title | Analysis of the effect of point-of-use filtration on microbridging defectivity | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Gronheid, Roel | |
dc.contributor.imecauthor | Van Den Heuvel, Dieter | |
dc.contributor.imecauthor | Foubert, Philippe | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 72730S | |
dc.source.conference | Advances in Resist Materials and Processing Technology XXVI | |
dc.source.conferencedate | 22/02/2009 | |
dc.source.conferencelocation | San José, CA USA | |
imec.availability | Published - imec | |
imec.internalnotes | Proceedings SPIE; Vol. 7273 | |