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The analysis of ultra-thin films with HRBS-30

dc.contributor.authorBrijs, Bert
dc.contributor.authorKimura, K.
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T21:28:19Z
dc.date.available2021-10-17T21:28:19Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15042
dc.sourceIIOimport
dc.titleThe analysis of ultra-thin films with HRBS-30
dc.typeMeeting abstract
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference5th International Workshop on High-Resolution Depth Profiling
dc.source.conferencedate15/11/2009
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - open access


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