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In situ bow monitoring: towards uniform blue and green InGaN/GaN quantum well structures grown on 100mm sapphire substrates by MOVPE
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Authors
Cheng, Kai
;
Degroote, Stefan
;
Leys, Maarten
;
Zhang, Liyang
;
Derluyn, Joff
;
Germain, Marianne
;
Borghs, Gustaaf
Conference
8th International Conference on Nitride Semiconductors - ICNS
Title
In situ bow monitoring: towards uniform blue and green InGaN/GaN quantum well structures grown on 100mm sapphire substrates by MOVPE
Publication type
Proceedings paper
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