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Migrating from planar to FinFET for further CMOS scaling: SOI or bulk?

dc.contributor.authorChiarella, Thomas
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorKerner, Christoph
dc.contributor.authorDittrich, Rok
dc.contributor.authorRakowski, Michal
dc.contributor.authorOrtolland, Claude
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorParvais, Bertrand
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorKubicek, Stefan
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVrancken, Christa
dc.contributor.authorBrus, Stephan
dc.contributor.authorLauwers, Anne
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.contributor.authorHoffmann, Thomas Y.
dc.date.accessioned2021-10-17T21:34:41Z
dc.date.available2021-10-17T21:34:41Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15091
dc.sourceIIOimport
dc.titleMigrating from planar to FinFET for further CMOS scaling: SOI or bulk?
dc.typeProceedings paper
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorRakowski, Michal
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage85
dc.source.endpage88
dc.source.conference39th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate14/09/2009
dc.source.conferencelocationAthens Greece
imec.availabilityPublished - open access
imec.internalnotesJoint session with ESSCIRC


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