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Electrical defect issues of hetero-epitaxy for advanced nanometric CMOS technologies
Publication:
Electrical defect issues of hetero-epitaxy for advanced nanometric CMOS technologies
Date
2009
Proceedings Paper
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18835.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claeys, Cor
;
Bargallo Gonzalez, Mireia
;
Eneman, Geert
;
Hikavyy, Andriy
;
Loo, Roger
;
Simoen, Eddy
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Abstract
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1859
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Metrics
Views
1859
since deposited on 2021-10-17
417
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations