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Defect aspects of Ge-on-Si materials and devices
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Authors
Claeys, Cor
;
Eneman, Geert
;
Wang, Gang
;
Souriau, Laurent
;
Loo, Roger
;
Simoen, Eddy
Conference
International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors - ULSIC
Title
Defect aspects of Ge-on-Si materials and devices
Publication type
Proceedings paper
Embargo date
9999-12-31
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