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Safety and reliability issues for introducing new materials in a 300 mm Si R&D process line

dc.contributor.authorClaeys, Cor
dc.contributor.authorPardon, Alain
dc.contributor.authorLebon, Hans
dc.date.accessioned2021-10-17T21:37:25Z
dc.date.available2021-10-17T21:37:25Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15111
dc.sourceIIOimport
dc.titleSafety and reliability issues for introducing new materials in a 300 mm Si R&D process line
dc.typeOral presentation
dc.contributor.imecauthorPardon, Alain
dc.contributor.imecauthorLebon, Hans
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on Materials and Devices for Safety and Security - IWMD-SS
dc.source.conferencedate20/02/2009
dc.source.conferencelocationOokayama Japan
imec.availabilityPublished - imec


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