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Vibrational spectroscopy of low-k films: exploring the potentiality of μ-Raman characterization

dc.contributor.authorClemente, Francesca
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorHantschel, Thomas
dc.date.accessioned2021-10-17T21:38:00Z
dc.date.available2021-10-17T21:38:00Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15115
dc.sourceIIOimport
dc.titleVibrational spectroscopy of low-k films: exploring the potentiality of μ-Raman characterization
dc.typeMeeting abstract
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewyes
dc.source.beginpageD1.10
dc.source.conferenceMRS Spring Meeting Symposium D: Materials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics
dc.source.conferencedate13/04/2009
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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