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Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response

dc.contributor.authorClima, Sergiu
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorMenou, Nicolas
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorRothschild, Aude
dc.contributor.authorKaczer, Ben
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorWang, Xin Peng
dc.contributor.authorSwerts, Johan
dc.contributor.authorPierreux, Dieter
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorWouters, Dirk
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-17T21:38:45Z
dc.date.available2021-10-17T21:38:45Z
dc.date.issued2009
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15120
dc.sourceIIOimport
dc.titleSr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response
dc.typeJournal article
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1936
dc.source.endpage1938
dc.source.journalMicroelectronic Engineering
dc.source.issue7_9
dc.source.volume86
dc.identifier.urlhttp://dx.doi.org/10.1016/j.mee.2009.03.029
imec.availabilityPublished - open access
imec.internalnotesINFOS 2009


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