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Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response
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Authors
Clima, Sergiu
;
Pourtois, Geoffrey
;
Menou, Nicolas
;
Popovici, Mihaela Ioana
;
Rothschild, Aude
;
Kaczer, Ben
;
Van Elshocht, Sven
;
Wang, Xin Peng
;
Swerts, Johan
;
Pierreux, Dieter
;
De Gendt, Stefan
;
Wouters, Dirk
;
Kittl, Jorge
ISSN
0167-9317
Issue
7_9
Journal
Microelectronic Engineering
Volume
86
Title
Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response
Publication type
Journal article
Embargo date
9999-12-31
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