Publication:

Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response

Date

2009
Journal article
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Author(s)

Clima, Sergiu  
;
Pourtois, Geoffrey  
;
Menou, Nicolas
;
Popovici, Mihaela Ioana  
;
Rothschild, Aude
;
Kaczer, Ben  
;
Van Elshocht, Sven  
;
Wang, Xin Peng
;
Swerts, Johan  
;
Pierreux, Dieter  
;
De Gendt, Stefan  
;
Wouters, Dirk
;
Kittl, Jorge

Journal

Microelectronic Engineering

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1883 since deposited on 2021-10-17
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1883 since deposited on 2021-10-17
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Acq. date: 2026-01-11

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