Publication:

Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response

Date

2009

Journal article

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Files

18212.pdf 506.59 KB

Author(s)

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Pourtois, Geoffrey

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Popovici, Mihaela Ioana

;

Rothschild, Aude

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Van Elshocht, Sven

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;

;

Pierreux, Dieter

;

De Gendt, Stefan

;

;

Journal

Microelectronic Engineering

Metrics

1882 since deposited on 2021-10-17

Acq. date: 2025-12-15