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Composition quantification of microelectronics multilayer thin films by EDX: toward small scale analysis

dc.contributor.authorConard, Thierry
dc.contributor.authorArstila, Kai
dc.contributor.authorHantschel, Thomas
dc.contributor.authorFranquet, Alexis
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVecchio, Emma
dc.contributor.authorBauer, Frank
dc.contributor.authorBurgess, Simon
dc.date.accessioned2021-10-17T21:39:41Z
dc.date.available2021-10-17T21:39:41Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15126
dc.sourceIIOimport
dc.titleComposition quantification of microelectronics multilayer thin films by EDX: toward small scale analysis
dc.typeProceedings paper
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVecchio, Emma
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageHH08-08
dc.source.conferenceElectron Crystallography for Materials Research and Quantitative Characterization of Nanostructured Materials
dc.source.conferencedate13/04/2009
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 1184


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