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Effect of substrate charging on the reliability of capacitive RF MEMS switches

dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSoussan, Philippe
dc.contributor.authorEkkels, Phillip
dc.contributor.authorMuller, Philippe
dc.contributor.authorNolmans, Philip
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.contributor.authorPuers, Bob
dc.contributor.authorMarchand, Laurent
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-17T21:43:40Z
dc.date.available2021-10-17T21:43:40Z
dc.date.issued2009
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15152
dc.sourceIIOimport
dc.titleEffect of substrate charging on the reliability of capacitive RF MEMS switches
dc.typeJournal article
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorMuller, Philippe
dc.contributor.imecauthorNolmans, Philip
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage261
dc.source.endpage268
dc.source.journalSensors and Actuators A: Physical
dc.source.issue2
dc.source.volume154
imec.availabilityPublished - open access


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