dc.contributor.author | Czarnecki, Piotr | |
dc.contributor.author | Rottenberg, Xavier | |
dc.contributor.author | Soussan, Philippe | |
dc.contributor.author | Ekkels, Phillip | |
dc.contributor.author | Muller, Philippe | |
dc.contributor.author | Nolmans, Philip | |
dc.contributor.author | De Raedt, Walter | |
dc.contributor.author | Tilmans, Harrie | |
dc.contributor.author | Puers, Bob | |
dc.contributor.author | Marchand, Laurent | |
dc.contributor.author | De Wolf, Ingrid | |
dc.date.accessioned | 2021-10-17T21:43:40Z | |
dc.date.available | 2021-10-17T21:43:40Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | 0924-4247 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15152 | |
dc.source | IIOimport | |
dc.title | Effect of substrate charging on the reliability of capacitive RF MEMS switches | |
dc.type | Journal article | |
dc.contributor.imecauthor | Czarnecki, Piotr | |
dc.contributor.imecauthor | Rottenberg, Xavier | |
dc.contributor.imecauthor | Soussan, Philippe | |
dc.contributor.imecauthor | Muller, Philippe | |
dc.contributor.imecauthor | Nolmans, Philip | |
dc.contributor.imecauthor | De Raedt, Walter | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.imecauthor | Puers, Bob | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | Soussan, Philippe::0000-0002-1347-6978 | |
dc.contributor.orcidimec | De Raedt, Walter::0000-0002-7117-7976 | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 261 | |
dc.source.endpage | 268 | |
dc.source.journal | Sensors and Actuators A: Physical | |
dc.source.issue | 2 | |
dc.source.volume | 154 | |
imec.availability | Published - open access | |