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Effect of substrate charging on the reliability of capacitive RF MEMS switches
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Authors
Czarnecki, Piotr
;
Rottenberg, Xavier
;
Soussan, Philippe
;
Ekkels, Phillip
;
Muller, Philippe
;
Nolmans, Philip
;
De Raedt, Walter
;
Tilmans, Harrie
;
Puers, Bob
;
Marchand, Laurent
;
De Wolf, Ingrid
ISSN
0924-4247
Issue
2
Journal
Sensors and Actuators A: Physical
Volume
154
Title
Effect of substrate charging on the reliability of capacitive RF MEMS switches
Publication type
Journal article
Embargo date
9999-12-31
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