Publication:

Effect of substrate charging on the reliability of capacitive RF MEMS switches

Date

2009
Journal article
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16325.pdf 1.24 MB

Author(s)

Czarnecki, Piotr  
;
Rottenberg, Xavier  
;
Soussan, Philippe  
;
Ekkels, Phillip
;
Muller, Philippe  
;
Nolmans, Philip  
;
De Raedt, Walter  
;
Tilmans, Harrie  
;
Puers, Bob  
;
Marchand, Laurent
;
De Wolf, Ingrid  

Journal

Sensors and Actuators A: Physical

Abstract

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1964 since deposited on 2021-10-17
Acq. date: 2025-12-10

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1964 since deposited on 2021-10-17
Acq. date: 2025-12-10

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