Effect of substrate charging on the reliability of capacitive RF MEMS switches

Simple item page Full metadata Statistics

Files

16325.pdf 1.24 MB

Author(s)

Czarnecki, Piotr

;

Rottenberg, Xavier

;

Soussan, Philippe

;

Ekkels, Phillip

;

Muller, Philippe

;

Nolmans, Philip

;

De Raedt, Walter

;

Tilmans, Harrie

;

;

Marchand, Laurent

;

De Wolf, Ingrid

Journal

Sensors and Actuators A: Physical

Metrics

1963 since deposited on 2021-10-17

419item.page.metrics.field.last-week

Acq. date: 2025-10-24