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Robustness of electrostatic MEMS actuators against electrical overstress

dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorEkkels, Phillip
dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-17T21:45:49Z
dc.date.available2021-10-17T21:45:49Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15165
dc.sourceIIOimport
dc.titleRobustness of electrostatic MEMS actuators against electrical overstress
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage893
dc.source.endpage896
dc.source.conferenceTransducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems
dc.source.conferencedate21/06/2009
dc.source.conferencelocationDenver, CO USA
imec.availabilityPublished - imec


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