Publication:

Applications of laser vibrometry during MEMS device qualification

Date

2009
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Author(s)

De Coster, Jeroen  
;
Sangameswaran, Sandeep
;
De Wolf, Ingrid  

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1916 since deposited on 2021-10-17
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1916 since deposited on 2021-10-17
Acq. date: 2026-02-24

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