On the origin of grass formation in MHM-based single-damascene low-k etch

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Authors
de Marneffe, Jean-Francois; Goossens, Danny; Conard, Thierry; Hendrickx, Dirk; Struyf, Herbert; Boullart, Werner
Conference
2nd International Plasma Etch and Strip in Microelectronics Workshop - PESM
Title
On the origin of grass formation in MHM-based single-damascene low-k etch
Publication type
Meeting abstract
Embargo date
9999-12-31
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