Publication:

On the origin of grass formation in MHM-based single-damascene low-k etch

Date

2009

Meeting abstract

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Files

17400.pdf 206.5 KB

Author(s)

de Marneffe, Jean-Francois

;

Goossens, Danny

;

Conard, Thierry

;

Hendrickx, Dirk

;

Struyf, Herbert

;

Boullart, Werner

Statistics

1954 since deposited on 2021-10-17

Acq. date: 2026-02-26