Suspended membrane inductors and capacitors for application in silicon MMIC's

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Authors
Sun, Y.; van Zeijl, H.; Tauritz, J. L.; Baets, Roel
Conference
IEEE 1996 Microwave and Millimeter-Wave Monolithic Circuits Symposium. Digest of Papers
Title
Suspended membrane inductors and capacitors for application in silicon MMIC's
Publication type
Proceedings paper
Embargo date
9999-12-31
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