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Patterning and metallization options for advanced contact module integration

dc.contributor.authorDemuynck, Steven
dc.date.accessioned2021-10-17T21:55:25Z
dc.date.available2021-10-17T21:55:25Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15220
dc.sourceIIOimport
dc.titlePatterning and metallization options for advanced contact module integration
dc.typeProceedings paper
dc.contributor.imecauthorDemuynck, Steven
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage795
dc.source.endpage796
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate7/10/2009
dc.source.conferencelocationSendai Japan
imec.availabilityPublished - open access


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