Dielectric reliability of 50nm half pitch structures in Aurora® LK

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Authors

Demuynck, Steven; Kim, Honggun; Huffman, Craig; Darnon, Maxime; Struyf, Herbert; Versluijs, Janko; Claes, Martine; Vereecke, Guy; Verdonck, Patrick; Volders, Henny; Heylen, Nancy; Kellens, Kristof; De Roest, David; Sprey, Hessel; Beyer, Gerald

ISSN

0021-4922

Issue

4

Journal

Japanese Journal of Applied Physics

Volume

48

Title

Dielectric reliability of 50nm half pitch structures in Aurora® LK

Publication type

Journal article

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