Publication:

Dielectric reliability of 50nm half pitch structures in Aurora® LK

Date

2009

Journal article

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Author(s)

Demuynck, Steven

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Struyf, Herbert

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Versluijs, Janko

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Verdonck, Patrick

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Kellens, Kristof

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De Roest, David

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Journal

Japanese Journal of Applied Physics

Statistics

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Acq. date: 2026-09-16