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Dielectric reliability of 50nm half pitch structures in Aurora® LK

dc.contributor.authorDemuynck, Steven
dc.contributor.authorKim, Honggun
dc.contributor.authorHuffman, Craig
dc.contributor.authorDarnon, Maxime
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVersluijs, Janko
dc.contributor.authorClaes, Martine
dc.contributor.authorVereecke, Guy
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorVolders, Henny
dc.contributor.authorHeylen, Nancy
dc.contributor.authorKellens, Kristof
dc.contributor.authorDe Roest, David
dc.contributor.authorSprey, Hessel
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-17T21:55:54Z
dc.date.available2021-10-17T21:55:54Z
dc.date.issued2009
dc.identifier.issn0021-4922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15222
dc.sourceIIOimport
dc.titleDielectric reliability of 50nm half pitch structures in Aurora® LK
dc.typeJournal article
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorSprey, Hessel
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecStruyf, Herbert::0000-0002-6782-5424
dc.source.peerreviewyes
dc.source.beginpage04C018
dc.source.journalJapanese Journal of Applied Physics
dc.source.issue4
dc.source.volume48
dc.identifier.urlhttp://jjap.ipap.jp/link?JJAP/48/04C018/pdf
imec.availabilityPublished - imec


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