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Impact of the electrochemical properties of silicon wafer surfaces on copper outplating from HF solutions
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Authors
Teerlinck, Ivo
;
Mertens, Paul
;
Schmidt, Harald
;
Meuris, Marc
;
Heyns, Marc
Issue
10
Journal
Journal of the Electrochemical Society
Volume
143
Title
Impact of the electrochemical properties of silicon wafer surfaces on copper outplating from HF solutions
Publication type
Journal article
Embargo date
9999-12-31
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