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New SPM concept for accurate and repeatable tip positioning

dc.contributor.authorDuriau, Edouard
dc.contributor.authorClarysse, Marc
dc.contributor.authorMoussa, Alain
dc.contributor.authorVanhaeren, Danielle
dc.contributor.authorEyben, Pierre
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T22:01:54Z
dc.date.available2021-10-17T22:01:54Z
dc.date.issued2009
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15253
dc.sourceIIOimport
dc.titleNew SPM concept for accurate and repeatable tip positioning
dc.typeJournal article
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVanhaeren, Danielle
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecVanhaeren, Danielle::0000-0001-8624-9533
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1234
dc.source.endpage1237
dc.source.journalMicroelectronic Engineering
dc.source.issue4_6
dc.source.volume86
imec.availabilityPublished - open access


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