Evaluation of platinum as a structural thin film material for RF-MEMS devices

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Authors

Ekkels, Phillip; Rottenberg, Xavier; Puers, Bob; Tilmans, Harrie

ISSN

0960-1317

Issue

6

Journal

Journal of Micromechanics and Microengineering

Volume

19

Title

Evaluation of platinum as a structural thin film material for RF-MEMS devices

Publication type

Journal article

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