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Evaluation of platinum as a structural thin film material for RF-MEMS devices

dc.contributor.authorEkkels, Phillip
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-17T22:03:49Z
dc.date.available2021-10-17T22:03:49Z
dc.date.issued2009
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15263
dc.sourceIIOimport
dc.titleEvaluation of platinum as a structural thin film material for RF-MEMS devices
dc.typeJournal article
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage65010
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue6
dc.source.volume19
dc.identifier.urlhttp://www.iop.org/EJ/article/0960-1317/19/6/065010/jmm9_6_065010.pdf
imec.availabilityPublished - imec


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