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Laser-induced crystallization of SiGe MEMS structural layers deposited at temperatures below 250C

dc.contributor.authorEl Rifai, Joumana
dc.contributor.authorSedky, Sherif
dc.contributor.authorWasfi, Rami
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T22:04:01Z
dc.date.available2021-10-17T22:04:01Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15264
dc.sourceIIOimport
dc.titleLaser-induced crystallization of SiGe MEMS structural layers deposited at temperatures below 250C
dc.typeProceedings paper
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewno
dc.source.beginpage1153-A19-03
dc.source.conferenceAmorphous and Polycrystalline Thin-Film Silicon Science and Technology
dc.source.conferencedate13/04/2009
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1153


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