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Vacuum packaged MEMS piezoelectric vibration energy harvesters
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Authors
Elfrink, Rene
;
Renaud, Michael
;
Kamel, Talal
;
de Nooijer, Christine
;
Jambunathan, Madhusudhanan
;
Goedbloed, Martijn
;
Hohlfeld, Dennis
;
Matova, Svetla
;
van Schaijk, Rob
Conference
PowerMEMS - 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
Title
Vacuum packaged MEMS piezoelectric vibration energy harvesters
Publication type
Proceedings paper
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