dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Clemente, Francesca | |
dc.contributor.author | Vanstreels, Kris | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Sankaran, Kiroubanand | |
dc.contributor.author | Clarysse, Trudo | |
dc.contributor.author | Mody, Jay | |
dc.contributor.author | Duriau, Edouard | |
dc.contributor.author | Hantschel, Thomas | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Mylvaganam, Kausala | |
dc.contributor.author | Zhang, Liangchi | |
dc.date.accessioned | 2021-10-17T22:09:03Z | |
dc.date.available | 2021-10-17T22:09:03Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15287 | |
dc.source | IIOimport | |
dc.title | Analysis and modeling of the HV-SSRM nanocontact on silicon | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Vanstreels, Kris | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.imecauthor | Sankaran, Kiroubanand | |
dc.contributor.imecauthor | Hantschel, Thomas | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.contributor.orcidimec | Sankaran, Kiroubanand::0000-0001-6988-7269 | |
dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
dc.source.peerreview | no | |
dc.source.conference | International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling | |
dc.source.conferencedate | 26/04/2009 | |
dc.source.conferencelocation | Napa, CA USA | |
imec.availability | Published - imec | |