Show simple item record

Evaluation of an advanced organic ultra-low-k material

dc.contributor.authorFerchichi, Abdelkarim
dc.contributor.authorTravaly, Youssef
dc.contributor.authorCarbonell, Laure
dc.contributor.authorVanstreels, Kris
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorAsakuma, S.
dc.contributor.authorNakajima, M.
dc.date.accessioned2021-10-17T22:12:03Z
dc.date.available2021-10-17T22:12:03Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15301
dc.sourceIIOimport
dc.titleEvaluation of an advanced organic ultra-low-k material
dc.typeProceedings paper
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage587
dc.source.endpage592
dc.source.conferenceAdvanced Metallization Conference 2008 (AMC 2008)
dc.source.conferencedate23/09/2008
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
18552.pdf
Size:
901.8Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record