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Contour-quality assessment for OPC model calibration
Publication:
Contour-quality assessment for OPC model calibration
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Date
2009
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Filitchkin, Paul
;
Do, Thuy
;
Kusnadi, Ir
;
Sturtevant, John
;
De Bisschop, Peter
;
Van de Kerkhove, Jeroen
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1896
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations
Metrics
Views
1896
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations