Contour-quality assessment for OPC model calibration

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Authors
Filitchkin, Paul; Do, Thuy; Kusnadi, Ir; Sturtevant, John; De Bisschop, Peter; Van de Kerkhove, Jeroen
Conference
Metrology, Inspection and Process Control for Microlithography XXIII
Title
Contour-quality assessment for OPC model calibration
Publication type
Proceedings paper
Embargo date
9999-12-31
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