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In situ studies of Pd/Ge layers for ohmic contact on GaAs and InGaAs

dc.contributor.authorFirrincieli, Andrea
dc.contributor.authorSimoen, Eddy
dc.contributor.authorMeuris, Marc
dc.contributor.authorClaeys, Cor
dc.contributor.authorOpsomer, Karl
dc.contributor.authorDetavernier, C.
dc.contributor.authorVan Meirhaeghe, R.L.
dc.date.accessioned2021-10-17T22:14:12Z
dc.date.available2021-10-17T22:14:12Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15311
dc.sourceIIOimport
dc.titleIn situ studies of Pd/Ge layers for ohmic contact on GaAs and InGaAs
dc.typeMeeting abstract
dc.contributor.imecauthorFirrincieli, Andrea
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage37
dc.source.conference215th ECS Meeting
dc.source.conferencedate24/05/2009
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesMeeting Abstracts; Vol. 2009-01


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