Electrical transport characterization of nano CMOS devices with ultra-thin silicon film

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Authors
Ghibaudo, G.; Mouis, M.; Pham-Nguyen, L.; Bennamane, K.; Pappas, I.; Cros, A.; Bidal, G.; Fleury, D.; Claverie, A.; Benassayag, G.; Fazzini, P.-F.; Fenouillet-Beranger, C.; Monfray, S.; Boeuf, F.; Cristoloveanu, S.; Skotnicki, T.; Collaert, Nadine
Conference
9th International Workshop on Junction Technology - IWJT
Title
Electrical transport characterization of nano CMOS devices with ultra-thin silicon film
Publication type
Proceedings paper
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