Show simple item record

FIM observation of dopants in silicon

dc.contributor.authorGilbert, Matthieu
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T22:22:52Z
dc.date.available2021-10-17T22:22:52Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15350
dc.sourceIIOimport
dc.titleFIM observation of dopants in silicon
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceAtom Probe Workshop
dc.source.conferencedate13/09/2009
dc.source.conferencelocationOxford UK
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record