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Modeling the substrate effects on nanoindentation mechanical property measurement

dc.contributor.authorGonzalez, Mario
dc.contributor.authorVanstreels, Kris
dc.contributor.authorUrbanowicz, Adam
dc.date.accessioned2021-10-17T22:27:30Z
dc.date.available2021-10-17T22:27:30Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15370
dc.sourceIIOimport
dc.titleModeling the substrate effects on nanoindentation mechanical property measurement
dc.typeProceedings paper
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewno
dc.source.beginpage486
dc.source.endpage490
dc.source.conference10th Int. Conf. Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics - EuroSimE
dc.source.conferencedate27/04/2009
dc.source.conferencelocationDelft The Netherlands
imec.availabilityPublished - imec


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